Process Challenges in Compound Semiconductors (1988)
Chapter: ION IMPLANTATION AND ACTIVATION
Unfortunately, this book can't be printed from the OpenBook.
If you need to print pages from this book, we recommend
downloading it as a PDF.
Visit NAP.edu/10766 to get more information about this book, to buy it in print, or to download it as a free PDF.
Visit NAP.edu/10766 to get more information about this book, to buy it in print, or to download it as a free PDF.
Previous Chapter:
ETCHING AND LITHOGRAPHY
Next Chapter: DIELECTRICS AND METAL CONTACTS FOR GROUP III-V SEMICONDUCTORS
Subscribe to Emails from the National Academies
Stay up to date on activities, publications, and events by subscribing to email updates.